Calibration Services from MKS Instruments
What is Calibration?
Calibration is the process of characterizing a measuring instrument by determining its deviation from a known standard, and thereby ascertaining the correction factors for that instrument.
Why Calibrate?
Calibration is an essential part of any corporate quality management program, provides traceability to standards set by government agencies, and ensures accurate and repeatable performance of instruments.
What are my options for Calibration?
Learn more about Calstand® pressure and flow rate calibrators available from MKS.
Or learn more about calibration services available from MKS below.
Why Use MKS for Calibration?
During the 35+ years we have manufactured pressure and flow instrumentation, MKS Instruments, Inc. has achieved an admirable reputation for quality and accuracy. The name Baratron® has become synonymous with high accuracy pressure measurements. In addition, MKS achieved ISO 9001 Certification in 1993. Today our products are used throughout the world as calibration standards, helping our customers achieve the quality they require in their work. Over the years, we have devoted considerable resources and effort to our own calibration standards and procedures. MKS utilizes the latest in quality assurance techniques throughout our production and service areas. Calibrations are directly traceable to the National Institute of Standards and Technology (NIST). In addition, our facilities are routinely audited by government agencies and many industrial customers for compliance with regulations or special procedures. A list of organizations that have given MKS audit approval is available upon request.
What Types of Instruments Does MKS Calibrate?
MKS offers traceable calibrations on pressure/vacuum gauges in the range of 5 x 10-7 Torr to 3000 PSI, and on gaseous flow gauging in the range of 1 sccm to 400 slm. MKS also offers on-site calibration services for pressure/vacuum gauges in the range of 5 X 10-5 Torr to 1,000 Torr, and on gas flow instruments in the range of 1 sccm to 300 slm. Some of the more common types of gauges that we can calibrate are listed in the charts below and on page 21, and include non-MKS equipment as well.
Where is the Calibration Performed?
MKS performs the calibrations at either one of our Calibration and Service Centers or the customer's facility, and provides all the necessary standards and equipment to test and calibrate the equipment.
Types of Instruments Calibrated
Typical Pressure Measurement Instruments
Vacuum Gauges
Capacitance manometers,
Thermocouple gauges,
Pirani gauges,
Hot filament ionization gauges,
Cold cathode ionization gauges,
Spinning rotor gauges
Pressure Indicators
Dial gauges,
Bourdon gauges
Pressure Transducers and
Transmitters
Variable capacitance,
Variable reluctance,
Strain gauges,
or any other that produces a useable
output signal
Typical Flow Measurement Instruments
Thermal Mass Flow Meters and Controllers
Vapor Source Mass Flow Controllers
Documentation and Traceability
Our procedures and documentation include recording of initial and final calibration data, as well as supporting documentation of test reports and traceability.
All calibrations are directly traceable to NIST and meet the rigorous requirements of ISO10012-1 as well as our own in-house Quality Requirements of MKS Service Facilities Manuals.
Special Calibration Services
In addition to our standard calibration services, we can customize our services to your particular needs. For example, you may wish to specify particular calibration points or range, a bidirectional calibration (for differential sensors), special gases (limited), a particular line pressure, direct primary standard calibration, etc. Let us know what you need.
When Should Instruments Be Calibrated?
The charts below show the recommended calibration intervals for pressure and gas flow instruments. More frequent calibrations can be scheduled in order to obtain data required for SPC.
Download "Calibration Services", from MKS Instruments.
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Need more help?
Contact an MKS Service Specialist by sending an email to MKS or call:
800-227-8766
978-284-4000 (outside the USA),
877-464-2789 (24/7 technical assistance in the USA).